METHOD FOR MANUFACTURING LAMINATED PLATE FOR WORKPIECE HOLDING MATERIAL, LAMINATED PLATE FOR WORKPIECE HOLDING MATERIAL, AND WORKPIECE HOLDING MATERIAL

PROBLEM TO BE SOLVED: To provide a laminated plate for a workpiece holding material, having an improved wettability of surface of the laminated plate, and suppressing polishing unevenness of surface of the workpiece. SOLUTION: The method for manufacturing a laminated plate for a workpiece holding ma...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	KITANO HIDEKI
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a laminated plate for a workpiece holding material, having an improved wettability of surface of the laminated plate, and suppressing polishing unevenness of surface of the workpiece. SOLUTION: The method for manufacturing a laminated plate for a workpiece holding material is used for achieving hydrophilization of the surface of the laminated plate by applying energy to the laminated plate. The energy applying means is preferably any one of a chemical treatment, corona discharge, glow discharge, plasma irradiation, radiation irradiation, ultraviolet irradiation, and irradiation of short-wave light having a 200 nm or less wavelength. The laminated plate consists of laminated prepregs having a base material impregnated with epoxy resin and heat-hardening resin material containing a hydrophilic or swelling additive. COPYRIGHT: (C)2010,JPO&INPIT