FLOATING CONVEYANCE DEVICE AND FLOATING UNIT

PROBLEM TO BE SOLVED: To enhance the efficiency of a conveyance operation of a substrate W by sufficiently restraining the interference of the substrate W and floating units 39 while conveying the substrate W. SOLUTION: The plurality of floating units 39 are arranged for a device frame 3 in a convey...

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Bibliographische Detailangaben
Hauptverfasser:	YOKOHAMA SHINSEI, ISHIZUKA NAOKO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To enhance the efficiency of a conveyance operation of a substrate W by sufficiently restraining the interference of the substrate W and floating units 39 while conveying the substrate W. SOLUTION: The plurality of floating units 39 are arranged for a device frame 3 in a conveyance direction and the respective floating units 39 have a hexagonal planar view, and the floating unit 39 includes two standard ridge edges 39a on a head side and four inclining ridge edges 39b. Nozzles 41 for injecting floating gas are formed along a planar view form on the upper surface of each floating unit 39 and the plurality of floating units 39 are arranged in a staggered array in the conveyance direction. COPYRIGHT: (C)2010,JPO&INPIT