VERTICAL PROBE CARD

PROBLEM TO BE SOLVED: To provide a vertical probe card capable of constricting a probe with respect to a rotation direction with a simple structure, without having to install a rectangular guidance hole. SOLUTION: The probe card includes a probe having a rectangular cross section and a protruding part at a side surface, a main substrate to which the upper end of the probe is connected, and a guide plate holding the probe; the guide plate includes an upper guide plate and a lower guide plate, provided with a spacer and arranged parallel at a prescribed vertical interval; the lower guide plate includes a first circular guide hole into which the probe is inserted; the upper guide plate includes a second circular guide hole into which the probe is inserted and a slit disposed above or below the second circular guide hole; and the protruding part of the probe abuts against the upper surface of the first circular guidance hole. COPYRIGHT: (C)2010,JPO&INPIT