METHOD OF INPUTTING LIGHT INTO MICRO OPTICAL COMPONENT USING COMPOUND CONTAINING Si-O-Si BONDING AND METHOD OF MANUFACTURING DEVICE

PROBLEM TO BE SOLVED: To establish a new method of combining light having any wavelengths to a micro optical component in the order of millimeter, micron or submicron represented by a silica glass micro ball. SOLUTION: The silica glass micro ball 3 as a micro optical component is positioned on the upper face, a side face or in the vicinity of a silica glass modification layer 2 formed by irradiating a solid silicone 1 as a compound containing Si-O-Si bonding with light having a wavelength not larger than 190 nm, and desired light is guided to the modification layer 2 thus the light is made incident to the micro ball 3. COPYRIGHT: (C)2010,JPO&INPIT