METHOD AND APPARATUS FOR PROVIDING FLOATING SEAL FOR CHAMBER DOOR

PROBLEM TO BE SOLVED: To provide a method and an apparatus for reliably sealing a chamber door. SOLUTION: This method is provided that includes a step of isolating a sealing surface from a chamber wall of a chamber and a step of sealing the chamber between the sealing surface and the chamber wall. T...

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Hauptverfasser:	BERKSTRESSER DAVID E, LEUNG BILLY C, KURITA SHINICHI
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CYLINDERS DIFFUSION TREATMENT OF METALLIC MATERIAL ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING MECHANICAL ENGINEERING METALLURGY PISTONS SEALINGS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method and an apparatus for reliably sealing a chamber door. SOLUTION: This method is provided that includes a step of isolating a sealing surface from a chamber wall of a chamber and a step of sealing the chamber between the sealing surface and the chamber wall. This apparatus is provided that includes a chamber wall section prone to deflection, a stationary section providing the sealing surface, and a flexible bellows attached to the chamber wall section and the stationary section. A system is also provided that includes the chamber including the chamber wall having an opening part, the door disposed to seal the opening part, the sealing surface adjacent to the opening part and isolated from the chamber wall, and a seal between the sealing surface and the chamber wall. COPYRIGHT: (C)2010,JPO&INPIT