APPARATUS FOR MANUFACTURING SILICON SINGLE CRYSTAL

PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a silicon single crystal, which prevents a heat insulating material from falling in a tubular member and can manufacture a silicon single crystal having a desired quality. SOLUTION: The apparatus for manufacturing a silicon single cryst...

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Bibliographische Detailangaben
1. Verfasser: KOGURE YASUHIRO
Format: Patent
Sprache:eng
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