CATALYTIC COMBUSTION TYPE GAS SENSOR

PROBLEM TO BE SOLVED: To provide a catalytic combustion type gas sensor strong against heat stress deformation. SOLUTION: The depression part 27 provided on a support base stand 22 and a diaphragm D are connected and, among a plurality of bridges 14 supporting the diaphragm D, a dummy member C for conducting the heat from a heater element 26 to a second bridge 14B corresponding to the application of voltage to an electrode terminal 13 is mounted on the second bridge 14B to relax the balance of stress by the difference between the membrane configuration of a first bridge 14A and the second bridge 14B. Further, if voltage is applied to the electrode terminal 13, the heater element 26 is heated and the heat transmitted to the first bridge 14A, and the second bridge 14B is uniformized to relax the damage caused by the distortion such as warpage or twist of the bridge 14 by a change with the elapse of time. COPYRIGHT: (C)2010,JPO&INPIT