STAGE APPARATUS, ALIGNER, AND DEVICE MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a stage apparatus suppressing performance deterioration. SOLUTION: The stage apparatus includes a moving member movable in a predetermined direction, an intake formed on a first side of the moving member facing a front space of the moving member to take a gas into th...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	NAGASAKA HIROYUKI, YAMATO SOICHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a stage apparatus suppressing performance deterioration. SOLUTION: The stage apparatus includes a moving member movable in a predetermined direction, an intake formed on a first side of the moving member facing a front space of the moving member to take a gas into the member, an air passage formed in the moving member to guide the gas from the intake and a first exhaust port formed in the moving member to exhaust the gas guided along the air passage. COPYRIGHT: (C)2010,JPO&INPIT