TILT STAGE DEVICE, AND STAGE ADJUSTING METHOD

PROBLEM TO BE SOLVED: To provide a function that allows tilting and rotating with minute angles and that provides excellent controllability when a relatively small object such as a sample piece is observed using a tilt stage that is simple in structure and inexpensive to manufacture. SOLUTION: A tilting device and a stage unit adjusting method are disclosed. The tilting device is composed mainly of three support legs 2 each having a small sphere at its top and a piezoelectric element 21 therein and reinforced on the outside by a pressure-imparting holder 22, and a sphere 1 having a stage unit 11 for placing a subject to be observed thereon and placed on the support legs. The sphere (stage hemisphere) can be tilted in all directions by causing the support legs to expand or contract to move their positions up and down. Also, an object or a sample to be observed which can be rotated by θ is placed on the stage unit to observe, operate and investigate the sample. COPYRIGHT: (C)2010,JPO&INPIT