SUBSTRATE FIRING DEVICE

PROBLEM TO BE SOLVED: To provide a substrate firing device having an increased contact area between a substrate and substrate support portions, thereby preventing generation of scratches on the substrate while the substrate support portions contract and expand due to increasing and lowering of the i...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHIN GENCHURU, JUNG WON-WOONG
Format: Patent
Sprache:eng
Schlagworte:
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