METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor device, which can prevent an increase in the number of processes, deterioration in quality and an increase in a chip size while improving the mobility of a carrier in a channel of a transistor. SOLUTION: A compressive nitrid...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SAKAMORI SHIGENORI, OGINO MASARU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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