INFRARED DETECTION DEVICE
PROBLEM TO BE SOLVED: To enable the increase of the supporting strength of a supporting body of an infrared detection part of an infrared imaging device. SOLUTION: The infrared detection part mounted on an insulation member above a cavity formed on the main surface of a silicon substrate, and a brid...
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| creator | NAKANISHI JUNJI ISHIKAWA TOMOHIRO KANEDA OSAMU |
| description | PROBLEM TO BE SOLVED: To enable the increase of the supporting strength of a supporting body of an infrared detection part of an infrared imaging device. SOLUTION: The infrared detection part mounted on an insulation member above a cavity formed on the main surface of a silicon substrate, and a bridge part supporting the insulation member above the cavity are included. The cross-sectional shape of the insulation member is adapted to have a step. Therefore, the second moment of area of the insulation member can be increased, and the rigidity of the insulation member as a supporting body for supporting the infrared detection part can be increased. This kind of structure is resistant to vibration, and can be used for the infrared imaging device suitable for transportable application such as monitoring application or the like. COPYRIGHT: (C)2010,JPO&INPIT |
| format | Patent |
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SOLUTION: The infrared detection part mounted on an insulation member above a cavity formed on the main surface of a silicon substrate, and a bridge part supporting the insulation member above the cavity are included. The cross-sectional shape of the insulation member is adapted to have a step. Therefore, the second moment of area of the insulation member can be increased, and the rigidity of the insulation member as a supporting body for supporting the infrared detection part can be increased. This kind of structure is resistant to vibration, and can be used for the infrared imaging device suitable for transportable application such as monitoring application or the like. 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| subjects | BASIC ELECTRIC ELEMENTS COLORIMETRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY SEMICONDUCTOR DEVICES TESTING |
| title | INFRARED DETECTION DEVICE |
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