SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR MANUFACTURING/INSPECTING DEVICE AND INSPECTING DEVICE

PROBLEM TO BE SOLVED: To provide a semiconductor device which has a Cu wiring containing a basic crystal structure which is not affected by variation in wiring width and capable of reducing a surface defect to a level lower than a practicable level, and to provide its inspecting technique. SOLUTION:...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAKADA YUJI, FUJIWARA TETSUO, HIROSE YUKINORI, NAKANO HIROSHI, SUDO KEIKI, KATO TAKAHIKO, SUGANO ITARU, SHONO TOMOTAKA, AKABOSHI HARUO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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