METHOD OF CALCULATING MEMBRANE CHARACTERISTICS

PROBLEM TO BE SOLVED: To provide technology capable of tracing a change in physical property value of a membrane observed during a process of wire formation with both reproducibility and simplicity. SOLUTION: The method of calculating a dielectric constant of an arbitrary membrane Ckin a composite membrane comprising a plurality of membranes sequentially layered on a substrate includes a composite membrane formation step of providing the composite membrane on the substrate, a single membrane formation step of providing membranes other than the arbitrary membrane Ckone by one on the substrate, a step of calculating a dielectric constant k (composite membrane) of the composite membrane obtained during the composite membrane formation step, a step of calculating respective dielectric constants k (single membrane) of single membranes other than the membrane Ckobtained during the single membrane formation step, a step of calculating a thickness d (composite membrane) of the composite membrane obtained during the composite membrane formation step, and a step of calculating thicknesses d (single membrane) of the respective membranes in the composite membrane obtained during the composite membrane formation step. COPYRIGHT: (C)2009,JPO&INPIT