MOLD FOR AEROGEL BASE FOR MANUFACTURING MEMS, AND METHOD OF FORMING THE SAME

PROBLEM TO BE SOLVED: To provide a method of forming a micro-electric machine, which achieves reduction of a material removal amount and shortening of machining time. SOLUTION: According to the method, an aerogel base layer 31 is deposited on a substrate 30, and a cavity 32 is formed in the aerogel...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	CARLSON ROBERT J
Format:	Patent
Sprache:	eng
Schlagworte:	MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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