MOLD FOR AEROGEL BASE FOR MANUFACTURING MEMS, AND METHOD OF FORMING THE SAME

MOLD FOR AEROGEL BASE FOR MANUFACTURING MEMS, AND METHOD OF FORMING THE SAME

PROBLEM TO BE SOLVED: To provide a method of forming a micro-electric machine, which achieves reduction of a material removal amount and shortening of machining time. SOLUTION: According to the method, an aerogel base layer 31 is deposited on a substrate 30, and a cavity 32 is formed in the aerogel...

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1. Verfasser: CARLSON ROBERT J
Format: Patent
Sprache:eng
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MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
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creator CARLSON ROBERT J
description PROBLEM TO BE SOLVED: To provide a method of forming a micro-electric machine, which achieves reduction of a material removal amount and shortening of machining time. SOLUTION: According to the method, an aerogel base layer 31 is deposited on a substrate 30, and a cavity 32 is formed in the aerogel base layer 31 by gallium ion beams. The shape of the aerogel base layer inclusive of the cavity is the same as the surface external shape of the micro-electric machine. Then the aerogel base layer 31 is employed as a mold, and a heavy metallic layer 34 made of silicon oxide, gold, platinum, polysilicon, or the like is deposited on the mode to form part of the micro-electric machine. COPYRIGHT: (C)2009,JPO&INPIT
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2009172759A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2009172759A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2009172759A3</originalsourceid><addsrcrecordid>eNrjZPDx9fdxUXDzD1JwdA3yd3f1UXByDHYFC_g6-oW6OTqHhAZ5-rkr-Lr6BusoOPq5AFkhHv4uCv5uIFW-ILkQD1eFYEdfVx4G1rTEnOJUXijNzaDk5hri7KGbWpAfn1pckJicmpdaEu8VYGRgYGlobmRuauloTJQiAL5eLcM</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>MOLD FOR AEROGEL BASE FOR MANUFACTURING MEMS, AND METHOD OF FORMING THE SAME</title><source>esp@cenet</source><creator>CARLSON ROBERT J</creator><creatorcontrib>CARLSON ROBERT J</creatorcontrib><description>PROBLEM TO BE SOLVED: To provide a method of forming a micro-electric machine, which achieves reduction of a material removal amount and shortening of machining time. SOLUTION: According to the method, an aerogel base layer 31 is deposited on a substrate 30, and a cavity 32 is formed in the aerogel base layer 31 by gallium ion beams. The shape of the aerogel base layer inclusive of the cavity is the same as the surface external shape of the micro-electric machine. Then the aerogel base layer 31 is employed as a mold, and a heavy metallic layer 34 made of silicon oxide, gold, platinum, polysilicon, or the like is deposited on the mode to form part of the micro-electric machine. COPYRIGHT: (C)2009,JPO&amp;INPIT</description><language>eng</language><subject>MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; TRANSPORTING</subject><creationdate>2009</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20090806&amp;DB=EPODOC&amp;CC=JP&amp;NR=2009172759A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20090806&amp;DB=EPODOC&amp;CC=JP&amp;NR=2009172759A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CARLSON ROBERT J</creatorcontrib><title>MOLD FOR AEROGEL BASE FOR MANUFACTURING MEMS, AND METHOD OF FORMING THE SAME</title><description>PROBLEM TO BE SOLVED: To provide a method of forming a micro-electric machine, which achieves reduction of a material removal amount and shortening of machining time. SOLUTION: According to the method, an aerogel base layer 31 is deposited on a substrate 30, and a cavity 32 is formed in the aerogel base layer 31 by gallium ion beams. The shape of the aerogel base layer inclusive of the cavity is the same as the surface external shape of the micro-electric machine. Then the aerogel base layer 31 is employed as a mold, and a heavy metallic layer 34 made of silicon oxide, gold, platinum, polysilicon, or the like is deposited on the mode to form part of the micro-electric machine. COPYRIGHT: (C)2009,JPO&amp;INPIT</description><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>PERFORMING OPERATIONS</subject><subject>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2009</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZPDx9fdxUXDzD1JwdA3yd3f1UXByDHYFC_g6-oW6OTqHhAZ5-rkr-Lr6BusoOPq5AFkhHv4uCv5uIFW-ILkQD1eFYEdfVx4G1rTEnOJUXijNzaDk5hri7KGbWpAfn1pckJicmpdaEu8VYGRgYGlobmRuauloTJQiAL5eLcM</recordid><startdate>20090806</startdate><enddate>20090806</enddate><creator>CARLSON ROBERT J</creator><scope>EVB</scope></search><sort><creationdate>20090806</creationdate><title>MOLD FOR AEROGEL BASE FOR MANUFACTURING MEMS, AND METHOD OF FORMING THE SAME</title><author>CARLSON ROBERT J</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2009172759A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2009</creationdate><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>CARLSON ROBERT J</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CARLSON ROBERT J</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MOLD FOR AEROGEL BASE FOR MANUFACTURING MEMS, AND METHOD OF FORMING THE SAME</title><date>2009-08-06</date><risdate>2009</risdate><abstract>PROBLEM TO BE SOLVED: To provide a method of forming a micro-electric machine, which achieves reduction of a material removal amount and shortening of machining time. SOLUTION: According to the method, an aerogel base layer 31 is deposited on a substrate 30, and a cavity 32 is formed in the aerogel base layer 31 by gallium ion beams. The shape of the aerogel base layer inclusive of the cavity is the same as the surface external shape of the micro-electric machine. Then the aerogel base layer 31 is employed as a mold, and a heavy metallic layer 34 made of silicon oxide, gold, platinum, polysilicon, or the like is deposited on the mode to form part of the micro-electric machine. COPYRIGHT: (C)2009,JPO&amp;INPIT</abstract><oa>free_for_read</oa></addata></record>
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subjects MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
title MOLD FOR AEROGEL BASE FOR MANUFACTURING MEMS, AND METHOD OF FORMING THE SAME
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-06T21%3A01%3A54IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=CARLSON%20ROBERT%20J&rft.date=2009-08-06&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJP2009172759A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true