MOLD FOR AEROGEL BASE FOR MANUFACTURING MEMS, AND METHOD OF FORMING THE SAME

MOLD FOR AEROGEL BASE FOR MANUFACTURING MEMS, AND METHOD OF FORMING THE SAME

PROBLEM TO BE SOLVED: To provide a method of forming a micro-electric machine, which achieves reduction of a material removal amount and shortening of machining time. SOLUTION: According to the method, an aerogel base layer 31 is deposited on a substrate 30, and a cavity 32 is formed in the aerogel...

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Bibliographische Detailangaben
1. Verfasser: CARLSON ROBERT J
Format: Patent
Sprache:eng
Schlagworte:
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method of forming a micro-electric machine, which achieves reduction of a material removal amount and shortening of machining time. SOLUTION: According to the method, an aerogel base layer 31 is deposited on a substrate 30, and a cavity 32 is formed in the aerogel base layer 31 by gallium ion beams. The shape of the aerogel base layer inclusive of the cavity is the same as the surface external shape of the micro-electric machine. Then the aerogel base layer 31 is employed as a mold, and a heavy metallic layer 34 made of silicon oxide, gold, platinum, polysilicon, or the like is deposited on the mode to form part of the micro-electric machine. COPYRIGHT: (C)2009,JPO&INPIT