SEALING STRUCTURE

PROBLEM TO BE SOLVED: To prevent a seal-ring 3 from being damaged or causing dust by a plasma within a sealed space S or corrosive fluid, or from being broken by excessive compression. SOLUTION: A sealing structure comprises a dovetail seal attaching groove 12, the seal-ring 3 in which side surface...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: ISHIGAKI YOSHIYUKI
Format: Patent
Sprache:eng
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