CERAMIC SINTERED COMPACT AND ELECTROSTATIC CHUCK USING THE SAME

PROBLEM TO BE SOLVED: To provide a ceramic sintered compact which has high corrosion resistance to a halogen gas and is excellent in attraction performance when being used as an electrostatic chuck. SOLUTION: The ceramic sintered compact is a spinel sintered compact consisting essentially of MgO and...

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Bibliographische Detailangaben
Hauptverfasser:	ISHIDA HIRONORI, UMEKI TOSHIYA, SAITO CHIKASHI, KITABAYASHI TETSUO
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LIME, MAGNESIA METALLURGY REFRACTORIES SEMICONDUCTOR DEVICES SLAG TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a ceramic sintered compact which has high corrosion resistance to a halogen gas and is excellent in attraction performance when being used as an electrostatic chuck. SOLUTION: The ceramic sintered compact is a spinel sintered compact consisting essentially of MgO and Al2O3, contains ≥0.02 mass% and