DEVICE OF INSPECTING EDGE OF SEMICONDUCTOR WAFER

PROBLEM TO BE SOLVED: To provide an inspecting device for a disc substrate which can accrately and quantitatively inspect the formation position of a film layer formed on the surface of a disc substrate. SOLUTION: The inspecting device is used to inspect a disc substrate wherein a film layer is form...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WAKABA HIROYUKI, MORI HIDEKI, ONO YOKO, MIYAZONO KOICHI, HAYASHI YOSHINORI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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