METHOD FOR INSPECTING FOREIGN MATTER IN TRANSPARENT PLATE

PROBLEM TO BE SOLVED: To provide a method for simply inspecting foreign matter in a transparent plate. SOLUTION: In the method for inspecting the foreign matter, light parallel to the surface of the transparent plate is made incident on at least one lateral edge of the transparent plate, such that e...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MASUDA SEIJI, MOTOYOSHI MASANORI
Format: Patent
Sprache:eng
Schlagworte:
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