SEMICONDUCTOR STRAIN SENSOR, AND MOUNTING METHOD OF SEMICONDUCTOR STRAIN SENSOR

PROBLEM TO BE SOLVED: To suppress a change of a sensor characteristic caused by temperature rise or thermal deformation by improving heat radiation from a sensor chip, in a semiconductor strain sensor using a semiconductor strain gage. SOLUTION: In this semiconductor strain sensor having a strain se...

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Bibliographische Detailangaben

Hauptverfasser:	KAZAMA ATSUSHI, OKADA RYOJI, KAWAI TETSURO
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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