METHOD FOR MANUFACTURING STAMPER FOR OPTICAL DISK

PROBLEM TO BE SOLVED: To provide a method for manufacturing a stamper with good peelability and transferability for an optical disk by electrocasting without forming a conductive layer on an irregular pattern of inorganic resist layer. SOLUTION: The method for manufacturing the stamper for optical d...

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Bibliographische Detailangaben
Hauptverfasser: ASANUMA TOYOHITO, HINO SHIGERU, ONO MASAYUKI, KAWASAKI MINORU
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method for manufacturing a stamper with good peelability and transferability for an optical disk by electrocasting without forming a conductive layer on an irregular pattern of inorganic resist layer. SOLUTION: The method for manufacturing the stamper for optical disk comprises: a step for forming an inorganic resist layer 11 on a surface of a substrate 10 including an element with an ionization energy greater than hydrogen atom and dispersing the element in the inorganic resist layer 11 from the substrate 10, a step for making an optical disk master which has the irregular pattern of a predetermined shape by partially removing the inorganic resist layer 11, a step for applying ozonation to the irregular pattern, a step for forming a metal layer 16 on the irregular pattern, and a step for peeling off the metal layer 16 from the irregular pattern to form the stamper. COPYRIGHT: (C)2009,JPO&INPIT