PARTICLE CONCENTRATION DETECTOR
PROBLEM TO BE SOLVED: To provide a particle concentration detector capable of more suitably reducing the contamination of a detection surface. SOLUTION: The particle concentration detector includes a detection mechanism 10 for detecting the quantity of the transmitted light of the light thrown on a...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a particle concentration detector capable of more suitably reducing the contamination of a detection surface. SOLUTION: The particle concentration detector includes a detection mechanism 10 for detecting the quantity of the transmitted light of the light thrown on a liquid from an emission part 20 by a light detection part 30, and the concentration of the particles in the liquid is detected on the basis of the quantity of the transmitted light detected by the detection mechanism 10. The detection mechanism 10 is provided with a first light guide 23 provided on the side of the light emitting surface of the emission part 20, a second light guide 33 provided on the side of the light detection surface of the light detection part 30, the liquid chamber 40 formed between the first light guide 23 and the second light guide 33 to permit the inflow of the liquid and the third light guide 50 provided in the liquid chamber 40 to be opposed to the first and second light guides 23 and 33 and oscillated in the liquid chamber 40. COPYRIGHT: (C)2009,JPO&INPIT |
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