REACTION-TREATING DEVICE

PROBLEM TO BE SOLVED: To provide a reaction-treating device carrying out the temperature control of a reaction zone, with high accuracy. SOLUTION: The reaction-treating device is equipped with a plurality of reaction zones, and a plurality of heating parts installed in each reaction zone. The heatin...

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Bibliographische Detailangaben
Hauptverfasser: MORIWAKI TOSHIKI, KANAI NOBUHIRO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a reaction-treating device carrying out the temperature control of a reaction zone, with high accuracy. SOLUTION: The reaction-treating device is equipped with a plurality of reaction zones, and a plurality of heating parts installed in each reaction zone. The heating part is equipped with the heat source of a heating resistor, a temperature-detecting means for detecting the value of resistance of a temperature measurement element installed in the heat source or the vicinity of the heat source and having resistivity-temperature characteristics for detecting the temperature of the heat source, based on a previously obtained correlation between the value of the resistivity and the temperature, and a heating control means for controlling the thermal dose of the heat source, based on the temperature information detected by the temperature-detecting means. COPYRIGHT: (C)2009,JPO&INPIT