EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND CLEANING METHOD FOR EXTREME ULTRAVIOLET LIGHT CONVERGING MIRROR

PROBLEM TO BE SOLVED: To remove debris by enabling a cleaning means to act efficiently on a portion contaminated with the debris caused by a metal or a metal compound, in an extreme ultraviolet light converging mirror. SOLUTION: Power is supplied between a first electrode 11 and a second electrode 1...

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1. Verfasser:	YABUTA YASUNOBU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY GAMMA RAY OR X-RAY MICROSCOPES IRRADIATION DEVICES NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR X-RAY TECHNIQUE
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