INSPECTION METHOD AND INSPECTION APPARATUS
PROBLEM TO BE SOLVED: To provide an inspection method and inspection apparatus capable of clarifying a defect detected with elastic scattered light and composition of an inspecting object plane, or a defect on the surface of an inspecting object and composition inside the inspecting object by improv...
Gespeichert in:
| Hauptverfasser: | , , , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | HOURAI MOTOO KOYABU HIROKAZU URANO YUTA JINGU TAKAHIRO |
| description | PROBLEM TO BE SOLVED: To provide an inspection method and inspection apparatus capable of clarifying a defect detected with elastic scattered light and composition of an inspecting object plane, or a defect on the surface of an inspecting object and composition inside the inspecting object by improving the S/N ratio by removing the inelastic scattered light from received scattered light, stably detecting a foreign substance or a defect, and selecting inelastic scattered light. SOLUTION: In this surface inspection method, the elastic scattered light and inelastic scattered light from the surface of the inspecting object are optically, independently or simultaneously detected, the existence of the defect of the inspecting object and the feature of the defect are detected, the location of the detected defect on the surface of the inspecting object is detected, the detected defect is classified according to the feature, and the defect is analyzed by inelastic scattered light detection based on the location of the defect, the feature of the defect, or the classifying result of the defect. COPYRIGHT: (C)2009,JPO&INPIT |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2009014510A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2009014510A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2009014510A3</originalsourceid><addsrcrecordid>eNrjZNDy9AsOcHUO8fT3U_B1DfHwd1Fw9HNRQBJ1DAhwDHIMCQ3mYWBNS8wpTuWF0twMSm6uIc4euqkF-fGpxQWJyal5qSXxXgFGBgaWBoYmpoYGjsZEKQIAqVElLg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>INSPECTION METHOD AND INSPECTION APPARATUS</title><source>esp@cenet</source><creator>HOURAI MOTOO ; KOYABU HIROKAZU ; URANO YUTA ; JINGU TAKAHIRO</creator><creatorcontrib>HOURAI MOTOO ; KOYABU HIROKAZU ; URANO YUTA ; JINGU TAKAHIRO</creatorcontrib><description>PROBLEM TO BE SOLVED: To provide an inspection method and inspection apparatus capable of clarifying a defect detected with elastic scattered light and composition of an inspecting object plane, or a defect on the surface of an inspecting object and composition inside the inspecting object by improving the S/N ratio by removing the inelastic scattered light from received scattered light, stably detecting a foreign substance or a defect, and selecting inelastic scattered light. SOLUTION: In this surface inspection method, the elastic scattered light and inelastic scattered light from the surface of the inspecting object are optically, independently or simultaneously detected, the existence of the defect of the inspecting object and the feature of the defect are detected, the location of the detected defect on the surface of the inspecting object is detected, the detected defect is classified according to the feature, and the defect is analyzed by inelastic scattered light detection based on the location of the defect, the feature of the defect, or the classifying result of the defect. COPYRIGHT: (C)2009,JPO&INPIT</description><language>eng</language><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2009</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20090122&DB=EPODOC&CC=JP&NR=2009014510A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76516</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20090122&DB=EPODOC&CC=JP&NR=2009014510A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HOURAI MOTOO</creatorcontrib><creatorcontrib>KOYABU HIROKAZU</creatorcontrib><creatorcontrib>URANO YUTA</creatorcontrib><creatorcontrib>JINGU TAKAHIRO</creatorcontrib><title>INSPECTION METHOD AND INSPECTION APPARATUS</title><description>PROBLEM TO BE SOLVED: To provide an inspection method and inspection apparatus capable of clarifying a defect detected with elastic scattered light and composition of an inspecting object plane, or a defect on the surface of an inspecting object and composition inside the inspecting object by improving the S/N ratio by removing the inelastic scattered light from received scattered light, stably detecting a foreign substance or a defect, and selecting inelastic scattered light. SOLUTION: In this surface inspection method, the elastic scattered light and inelastic scattered light from the surface of the inspecting object are optically, independently or simultaneously detected, the existence of the defect of the inspecting object and the feature of the defect are detected, the location of the detected defect on the surface of the inspecting object is detected, the detected defect is classified according to the feature, and the defect is analyzed by inelastic scattered light detection based on the location of the defect, the feature of the defect, or the classifying result of the defect. COPYRIGHT: (C)2009,JPO&INPIT</description><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2009</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNDy9AsOcHUO8fT3U_B1DfHwd1Fw9HNRQBJ1DAhwDHIMCQ3mYWBNS8wpTuWF0twMSm6uIc4euqkF-fGpxQWJyal5qSXxXgFGBgaWBoYmpoYGjsZEKQIAqVElLg</recordid><startdate>20090122</startdate><enddate>20090122</enddate><creator>HOURAI MOTOO</creator><creator>KOYABU HIROKAZU</creator><creator>URANO YUTA</creator><creator>JINGU TAKAHIRO</creator><scope>EVB</scope></search><sort><creationdate>20090122</creationdate><title>INSPECTION METHOD AND INSPECTION APPARATUS</title><author>HOURAI MOTOO ; KOYABU HIROKAZU ; URANO YUTA ; JINGU TAKAHIRO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2009014510A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2009</creationdate><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>HOURAI MOTOO</creatorcontrib><creatorcontrib>KOYABU HIROKAZU</creatorcontrib><creatorcontrib>URANO YUTA</creatorcontrib><creatorcontrib>JINGU TAKAHIRO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HOURAI MOTOO</au><au>KOYABU HIROKAZU</au><au>URANO YUTA</au><au>JINGU TAKAHIRO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>INSPECTION METHOD AND INSPECTION APPARATUS</title><date>2009-01-22</date><risdate>2009</risdate><abstract>PROBLEM TO BE SOLVED: To provide an inspection method and inspection apparatus capable of clarifying a defect detected with elastic scattered light and composition of an inspecting object plane, or a defect on the surface of an inspecting object and composition inside the inspecting object by improving the S/N ratio by removing the inelastic scattered light from received scattered light, stably detecting a foreign substance or a defect, and selecting inelastic scattered light. SOLUTION: In this surface inspection method, the elastic scattered light and inelastic scattered light from the surface of the inspecting object are optically, independently or simultaneously detected, the existence of the defect of the inspecting object and the feature of the defect are detected, the location of the detected defect on the surface of the inspecting object is detected, the detected defect is classified according to the feature, and the defect is analyzed by inelastic scattered light detection based on the location of the defect, the feature of the defect, or the classifying result of the defect. COPYRIGHT: (C)2009,JPO&INPIT</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_epo_espacenet_JP2009014510A |
| source | esp@cenet |
| subjects | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING |
| title | INSPECTION METHOD AND INSPECTION APPARATUS |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-15T05%3A45%3A08IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=HOURAI%20MOTOO&rft.date=2009-01-22&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJP2009014510A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |