VACUUM PUMP

PROBLEM TO BE SOLVED: To improve emissions performance in a high-pressure region substantially equal to an atmospheric pressure. SOLUTION: A pump chamber 3 of at least first stage from upstream end side of a vacuum pump is designed to have a capacity greater than those of pump chambers 4, 5, 6, 7 at...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: KOIZUMI TATSUNORI
Format: Patent
Sprache:eng
Schlagworte:
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