VACUUM PUMP
PROBLEM TO BE SOLVED: To improve emissions performance in a high-pressure region substantially equal to an atmospheric pressure. SOLUTION: A pump chamber 3 of at least first stage from upstream end side of a vacuum pump is designed to have a capacity greater than those of pump chambers 4, 5, 6, 7 at...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!