METHOD FOR MEASURING WRITE GAP OF THIN FILM MAGNETIC HEAD

PROBLEM TO BE SOLVED: To provide a method for measuring a write gap of a thin film magnetic head, with improved measuring accuracy of the write gap. SOLUTION: Part of a wafer is cut by irradiating a position which becomes a media-opposed surface of the thin film magnetic head with an ion beam, and t...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	OKI TOKUAKI, INAMURA JUNICHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for measuring a write gap of a thin film magnetic head, with improved measuring accuracy of the write gap. SOLUTION: Part of a wafer is cut by irradiating a position which becomes a media-opposed surface of the thin film magnetic head with an ion beam, and the cut surface is made a measuring target surface. Then, by irradiating the measuring target surface with an ion beam while supplying a carbon gas, a carbon is attached to the measuring target surface, and an SIM image with an invisible grain is obtained. Predetermined operation is performed using this SIM image with an invisible grain to calculate the write gap of the thin film magnetic head. COPYRIGHT: (C)2009,JPO&INPIT