SUBSTRATE CONVEYANCE APPARATUS

PROBLEM TO BE SOLVED: To provide a substrate conveyance apparatus which can move a substrate that is not located on a substrate carry-in sensor, a substrate carry-out sensor, or a substrate waiting sensor in the conveyance passage of the substrate conveyance apparatus onto the respective sensors saf...

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Bibliographische Detailangaben
1. Verfasser: SATO SHIGEKO
Format: Patent
Sprache:eng
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