COATING UNIT

PROBLEM TO BE SOLVED: To provide a coating unit which removes efficiently small lumps produced in the coating solution, uniforming the flow rate of the coating solution supplied from the bottom of the coating vessel and enables uniform coating. SOLUTION: The coating unit has a coating vessel 10 in w...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: FUJIOKA YUTAKA, TOZAWA HIRONORI, ITO AKINOBU
Format: Patent
Sprache:eng
Schlagworte:
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