LASER ANNEALER AND LASER ANNEALING METHOD

PROBLEM TO BE SOLVED: To perform laser annealing by using a laser beam with a uniform intensity distribution. SOLUTION: This invention relates to a laser annealer 1 equipped with: a laser oscillator 11; a beam homogenizer 13 which divides the laser beam into two or more; a condensing means for pilin...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAMAMOTO YOSHIAKI, ONISHI YOSHINORI, TAMAGAWA KOICHI, IKEDA HITOSHI, MORIMURA TARO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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