LASER ANNEALER AND LASER ANNEALING METHOD

LASER ANNEALER AND LASER ANNEALING METHOD

PROBLEM TO BE SOLVED: To perform laser annealing by using a laser beam with a uniform intensity distribution. SOLUTION: This invention relates to a laser annealer 1 equipped with: a laser oscillator 11; a beam homogenizer 13 which divides the laser beam into two or more; a condensing means for pilin...

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Hauptverfasser: YAMAMOTO YOSHIAKI, ONISHI YOSHINORI, TAMAGAWA KOICHI, IKEDA HITOSHI, MORIMURA TARO
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator YAMAMOTO YOSHIAKI
ONISHI YOSHINORI
TAMAGAWA KOICHI
IKEDA HITOSHI
MORIMURA TARO
description PROBLEM TO BE SOLVED: To perform laser annealing by using a laser beam with a uniform intensity distribution. SOLUTION: This invention relates to a laser annealer 1 equipped with: a laser oscillator 11; a beam homogenizer 13 which divides the laser beam into two or more; a condensing means for piling the divided laser beams into one; and a placement table installing a substrate by which the piled laser beams are irradiated, wherein two or more slit boards 16, 17 are arranged between the condensing means and the placement table, and a length in the longitudinal direction of each opening 161, 171 of each slit board is constituted to be shorter than a length in the longitudinal direction of the laser beam and to sequentially become shorter as approaching the placement table. COPYRIGHT: (C)2008,JPO&INPIT
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title LASER ANNEALER AND LASER ANNEALING METHOD
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