EVALUATING METHOD OF CONTAMINATION STATE OF SUBSTRATE MANUFACTURING SPACE

EVALUATING METHOD OF CONTAMINATION STATE OF SUBSTRATE MANUFACTURING SPACE

PROBLEM TO BE SOLVED: To provide a method of evaluating the amount of acid/base of space using a passive sampler capable of easily and efficiently adsorbing an acid matter or base matter without operation such as suction by a pump. SOLUTION: This evaluating method of a contamination state of space i...

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Hauptverfasser: HASEGAWA MIKIO, HARADA AI, IIKAWA REIKO, MORIYA TATSU
Format: Patent
Sprache:eng
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INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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creator HASEGAWA MIKIO
HARADA AI
IIKAWA REIKO
MORIYA TATSU
description PROBLEM TO BE SOLVED: To provide a method of evaluating the amount of acid/base of space using a passive sampler capable of easily and efficiently adsorbing an acid matter or base matter without operation such as suction by a pump. SOLUTION: This evaluating method of a contamination state of space is used in a substrate manufacturing process. In the substrate manufacturing process, the passive sampler having at least one kind of compound selected from a compound group consisting of carbonate of alkali metal and hydroxide of alkali metal is arranged as an absorbent in a space via which the substrate passes, the acid matter in the space is adsorbed by the adsorbent in the passive sampler, then the adsorbed acid matter is desorbed from the adsorbent, and the desorbed acid matter is analyzed. COPYRIGHT: (C)2008,JPO&INPIT
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title EVALUATING METHOD OF CONTAMINATION STATE OF SUBSTRATE MANUFACTURING SPACE
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