SUBSTRATE STORAGE WAREHOUSE

PROBLEM TO BE SOLVED: To provide an automated warehouse capable of replacing a substrate stored in a cassette with another substrate to be stored in it and carrying the cassette into/out of the warehouse at proper time. SOLUTION: This substrate storage warehouse 1 is provided with a multistep shelf...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ISHIBASHI KIEN, ONO TOSHITAKA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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