INPRINTABLE MEDIUM DISPENSER

PROBLEM TO BE SOLVED: To provide an imprintable medium dispenser used for imprint lithography and to provide a related method. SOLUTION: The imprintable medium dispenser includes a chamber, a nozzle, and an actuator connected to the chamber and configured to be actuated and thereby generate a pressu...

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Hauptverfasser: WUISTER SANDER FREDERIK, KRUIJT-STEGEMAN YVONNE WENDELA, DIJKSMAN JOHAN FREDERIK, PIERIK ANKE, VERNHOUT MARTIN MAURICE, SCHRAM IVAR
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creator WUISTER SANDER FREDERIK
KRUIJT-STEGEMAN YVONNE WENDELA
DIJKSMAN JOHAN FREDERIK
PIERIK ANKE
VERNHOUT MARTIN MAURICE
SCHRAM IVAR
description PROBLEM TO BE SOLVED: To provide an imprintable medium dispenser used for imprint lithography and to provide a related method. SOLUTION: The imprintable medium dispenser includes a chamber, a nozzle, and an actuator connected to the chamber and configured to be actuated and thereby generate a pressure wave within the chamber such that imprintable medium is dispensed from the nozzle. The imprintable medium dispenser is provided with a control circuit which includes a monitoring apparatus configured to receive a transient oscillation signal generated when the actuator is actuated, and to monitor the operation of the imprintable medium dispenser by monitoring the transient oscillation signal. COPYRIGHT: (C)2008,JPO&INPIT
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subjects AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL
APPARATUS SPECIALLY ADAPTED THEREFOR
APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
CORRECTION OF TYPOGRAPHICAL ERRORS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LINING MACHINES
MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
MATERIALS THEREFOR
MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES
NANOTECHNOLOGY
ORIGINALS THEREFOR
PERFORMING OPERATIONS
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
PRINTING
SELECTIVE PRINTING MECHANISMS
SEMICONDUCTOR DEVICES
SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR
SHAPING OR JOINING OF PLASTICS
SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
SPRAYING OR ATOMISING IN GENERAL
STAMPS
TRANSPORTING
TYPEWRITERS
WORKING OF PLASTICS
WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
title INPRINTABLE MEDIUM DISPENSER
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