METHOD AND DEVICE FOR HANDLING ARTICLE IN ITS COURSE OF SEMICONDUCTOR FABRICATION

PROBLEM TO BE SOLVED: To provide a method for handling an article in the course of semiconductor fabrication with which the risk of contamination caused by handling an article is low, or at least significantly reduced in comparison with previous handling methods. SOLUTION: The invention relates in p...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BRUECKNER GERD, SCHROEDER STEFFEN, SCHNEIDER GERMAR, DEUTSCHLAENDER ARTHUR, HEINRICH HARALD
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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