GAS HEAD, AND SEMICONDUCTOR MANUFACTURING APPARATUS
PROBLEM TO BE SOLVED: To provide a gas head 20 capable of improving the treatment efficiency and achieving uniform treatment. SOLUTION: The gas head 20 is provided with a first gas inlet port 26 for introducing a first gas; a gas ejection port 28 for ejecting a gas into a process chamber 11; and a g...
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Sprache: | eng |
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