METHOD OF OPERATING SUBSTRATE INSPECTION APPARATUS

PROBLEM TO BE SOLVED: To preferably inspect an object to be inspected by eliminating stress generating between a conveyance means and a guide shaft, and preventing stoppage of a moving object due to overload error. SOLUTION: While the other side of a mobile object 40 is made free, only one side of the mobile object 40 is moved along a first guide shaft 20 by means of a first conveyance means 25, and stresses which are produced at the engaging parts between the mobile object and the first and second conveyance means 25 and 35 are obtained at every specified position of the one side of the mobile object 40. An adjustment point is found out beforehand where the stress is a specified value or less. When the attitude of the mobile object is controlled to the first and second guide shafts 20 and 30, the first and second conveyance means are driven to move to the adjustment point, and either or both of engagement is released once between the mobile object and the first conveyance means and between the mobile object and the second conveyance means. Then, the mobile object and the first conveyance means and the mobile object and the second conveyance means are engaged again at the adjustment point, thereby restoring the attitude of the mobile object to a regular attitude. COPYRIGHT: (C)2008,JPO&INPIT