HERMETIC PASSIVATION LAYER STRUCTURE FOR CAPACITOR WITH PEROVSKITE PHASE OR PYROCHLORE PHASE DIELECTRICS

PROBLEM TO BE SOLVED: To provide a thin-film capacitor structure having a hermetic passivation layer structure including a hydrogen barrier or gettering layer, and its manufacturing method. SOLUTION: The thin-film capacitor structure includes a substrate and a thin-film capacitor attached on the sub...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CERVIN-LAWRY ANDREW, WOO PAUL BUN CHEUK, NAGY SUSAN C, CAPANU MIRCEA, ZELNER MARINA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE ELECTRICITY
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