CLEANING DEVICE AND TREATMENT APPARATUS HAVING CLEANING UNIT

PROBLEM TO BE SOLVED: To prevent leakage of cleaning liquid resulting from thermal expansion when hot cleaning liquid is used in a cleaning tank of cleaning device. SOLUTION: According to the present invention, a treatment apparatus (1) comprises a cleaning unit (an ultrasonic cleaning unit 25) that carries out cleaning treatment by immersing a cleaning object (wafer 2) into a cleaning tank (41). In the cleaning unit (the ultrasonic cleaning unit 25), side walls with different thicknesses (49, 50, 51 and 52) are joined together through packing (47) and the total width of each pressure nipping part (58, 59, 60 and 61) to be pressed between each side walls (49, 50, 51 and 52) and the bottom wall (46) are made uniform so that the area per unit length of each pressure nipping parts (58, 59, 60 and 61) is the same. COPYRIGHT: (C)2008,JPO&INPIT