SCANNING CHARGED PARTICLE BEAM DEVICE, IMAGE DISPLAY METHOD OF SAME, AND SCANNING MICROSCOPE

PROBLEM TO BE SOLVED: To provide a scanning charged particle beam device, an image display method of the same, and the scanning microscope suitable for easily conducting evaluation, control, and adjustment for reducing an effect of image trouble caused by vibration. SOLUTION: A cycle of a vertical s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ITO HIROYUKI, GUNJI KAZUHIRO, TOGAWA KENICHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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