SCANNING CHARGED PARTICLE BEAM DEVICE, IMAGE DISPLAY METHOD OF SAME, AND SCANNING MICROSCOPE

PROBLEM TO BE SOLVED: To provide a scanning charged particle beam device, an image display method of the same, and the scanning microscope suitable for easily conducting evaluation, control, and adjustment for reducing an effect of image trouble caused by vibration. SOLUTION: A cycle of a vertical scanning signal corresponding to a period for obtaining one image has a first half cycle (a first period) and a second half cycle (a second period) of one cycle in sine wave vibration. In order to compare a difference between the respective images, the image is displayed in an odd number field and an even number field of interlace scanning display. Thereby, a direction and magnitude the image shakes by the vibration can be simultaneously displayed by comparing the images obtained in the first period and second period with respect to an equal viewing field. COPYRIGHT: (C)2008,JPO&INPIT