SPIN COATER AND COATING METHOD

PROBLEM TO BE SOLVED: To provide a spin coater and coating method in which yield is improved by preventing mist from sneaking to a rear side of a substrate. SOLUTION: A spin coater comprises a rotary table 20 which is provided to freely rotate towards the inside of one surface, and a holding means 3...

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Bibliographische Detailangaben
Hauptverfasser:	ARAI SUMIO, YAMAUCHI NOBUHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a spin coater and coating method in which yield is improved by preventing mist from sneaking to a rear side of a substrate. SOLUTION: A spin coater comprises a rotary table 20 which is provided to freely rotate towards the inside of one surface, and a holding means 30 for holding a substrate 1 spaced from the one surface at a predetermined interval through a spacer 22 circumferentially provided at a predetermined interval on the one surface of the rotary table 20. Furthermore, a blowing means 40 is provided for blowing gases from the center side of the substrate 1 towards an outer circumferential side, between the rotary table 20 and the substrate 1. COPYRIGHT: (C)2007,JPO&INPIT