NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a non-volatile semiconductor memory device capable of increasing the contacting area between a semiconductor substrate in a cell array and wiring while reducing a variation in contact resistance, and to provide its manufacturing method. SOLUTION: In an NOR flash memo...

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Bibliographische Detailangaben
1. Verfasser: FUJIMOTO HIROMASA
Format: Patent
Sprache:eng
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