BREAKING-OFF DEVICE FOR PIEZOELECTRIC ELEMENT

PROBLEM TO BE SOLVED: To provide an element breaking-off device capable of accurately breaking off a plurality of piezoelectric elements supported by a wafer from the wafer at the same time. SOLUTION: The element breaking-off device includes: a breaking-off means 50 that includes a plurality of brea...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KARASAWA KEIKO, KAWAUCHI OSAMU, KARAKI TOSHIHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
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