IMPROVED LAMP

PROBLEM TO BE SOLVED: To improve a service life of a lamp, mostly on a lamp filament, for use in a semiconductor processing reactor in which a high energy radiation heating is conducted. SOLUTION: The lamp is provided with a supporting part 42 which is improved so that a lamp filament 14 can be plac...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: HALPIN MICHAEL W
Format: Patent
Sprache:eng
Schlagworte:
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