TEST PIECE CHAMBER DIFFERENTIAL EXHAUST APPARATUS

TEST PIECE CHAMBER DIFFERENTIAL EXHAUST APPARATUS

PROBLEM TO BE SOLVED: To greatly improve a service life of a detector detecting a secondary electron or a reflection electron even when vacuum in a test piece chamber is made low by effectively making use of a differential exhaust function in a small exhausting system regarding a test piece chamber...

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Hauptverfasser: ATAKA MASASHI, JINRIKI TAKENORI, ANAZAWA NORIMICHI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator ATAKA MASASHI
JINRIKI TAKENORI
ANAZAWA NORIMICHI
description PROBLEM TO BE SOLVED: To greatly improve a service life of a detector detecting a secondary electron or a reflection electron even when vacuum in a test piece chamber is made low by effectively making use of a differential exhaust function in a small exhausting system regarding a test piece chamber differential exhaust apparatus of a scanning type electron microscope producing an image by detecting the discharged secondary electrons or the reflection electrodes by carrying out planar scanning while having a test piece irradiated by an electron beam which is narrow-focused. SOLUTION: The test piece differential exhaust apparatus is composed of: a plurality of steps of orifices for exhausting of the differential provided between the test piece chamber for placing the test piece and a detector for detecting the secondary electrons or the reflected reflection electrons discharged by having the test piece placed in the test piece chamber irradiated by the electron beam; and an exhausting system directly connected to a part of a plurality of orifices. COPYRIGHT: (C)2007,JPO&INPIT
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title TEST PIECE CHAMBER DIFFERENTIAL EXHAUST APPARATUS
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