INSPECTION DEVICE FOR LIGHT-RECEIVING ELEMENT
PROBLEM TO BE SOLVED: To provide an inspection device capable of observing by an observation device while electrically or optically inspecting the light receiving element. SOLUTION: The inspection device 1 for inspecting the light receiving element 3a while irradiating the light receiving element 3a...
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| creator | DAIHO MASUMI |
| description | PROBLEM TO BE SOLVED: To provide an inspection device capable of observing by an observation device while electrically or optically inspecting the light receiving element. SOLUTION: The inspection device 1 for inspecting the light receiving element 3a while irradiating the light receiving element 3a to be measured comprises: the microscope 4 for observing the light receiving element 3a; the laser device 7 for emitting light; and the beam splitter 9 disposed between the microscope 4 and the light receiving element 3a, for separating the laser light from the laser device 7 into two beams one of which is emitted toward the light receiving element 3a as inspection light and the other is emitted to the light receiving device 8 as measuring light and the optical image of the light receiving element 3a is transmitted to the observation device. COPYRIGHT: (C)2007,JPO&INPIT |
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SOLUTION: The inspection device 1 for inspecting the light receiving element 3a while irradiating the light receiving element 3a to be measured comprises: the microscope 4 for observing the light receiving element 3a; the laser device 7 for emitting light; and the beam splitter 9 disposed between the microscope 4 and the light receiving element 3a, for separating the laser light from the laser device 7 into two beams one of which is emitted toward the light receiving element 3a as inspection light and the other is emitted to the light receiving device 8 as measuring light and the optical image of the light receiving element 3a is transmitted to the observation device. 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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR |
| title | INSPECTION DEVICE FOR LIGHT-RECEIVING ELEMENT |
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