THIN FILM CHARACTERISTIC EVALUATION METHOD, THIN FILM CHARACTERISTIC EVALUATION DEVICE, AND THIN FILM SOLAR CELL
PROBLEM TO BE SOLVED: To provide a thin film characteristic evaluation device for accurately evaluating characteristics of the surface state of a thin film, and to provide a thin film characteristic evaluation method. SOLUTION: The thin film characteristic evaluation device comprises: a centroid cal...
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| creator | IIDA MASAMI TAKANO GIYOUMI ASAKUSA KOICHI MURAKAMI CHIKASUKE UCHIHASHI KAZUMASA |
| description | PROBLEM TO BE SOLVED: To provide a thin film characteristic evaluation device for accurately evaluating characteristics of the surface state of a thin film, and to provide a thin film characteristic evaluation method. SOLUTION: The thin film characteristic evaluation device comprises: a centroid calculation part for finding the centroid of a figure obtained by making a boundary of each crystal parallel to the surface of the thin film on the basis of information indicating positions of each vertex and the boundary of an adjacent crystal of a plurality of crystals on the surface of the thin film including the plurality of the crystals and being projected on a reference plane being a plane including the bottom face of the crystal; and a crystal inclination angle calculation part for calculating a crystal inclination angle being an angle making a vertical line being a vertical straight line on the reference plane by allowing a centroid-vertex straight line connecting the centroid and the vertex to include the centroid. COPYRIGHT: (C)2007,JPO&INPIT |
| format | Patent |
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SOLUTION: The thin film characteristic evaluation device comprises: a centroid calculation part for finding the centroid of a figure obtained by making a boundary of each crystal parallel to the surface of the thin film on the basis of information indicating positions of each vertex and the boundary of an adjacent crystal of a plurality of crystals on the surface of the thin film including the plurality of the crystals and being projected on a reference plane being a plane including the bottom face of the crystal; and a crystal inclination angle calculation part for calculating a crystal inclination angle being an angle making a vertical line being a vertical straight line on the reference plane by allowing a centroid-vertex straight line connecting the centroid and the vertex to include the centroid. 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SOLUTION: The thin film characteristic evaluation device comprises: a centroid calculation part for finding the centroid of a figure obtained by making a boundary of each crystal parallel to the surface of the thin film on the basis of information indicating positions of each vertex and the boundary of an adjacent crystal of a plurality of crystals on the surface of the thin film including the plurality of the crystals and being projected on a reference plane being a plane including the bottom face of the crystal; and a crystal inclination angle calculation part for calculating a crystal inclination angle being an angle making a vertical line being a vertical straight line on the reference plane by allowing a centroid-vertex straight line connecting the centroid and the vertex to include the centroid. 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SOLUTION: The thin film characteristic evaluation device comprises: a centroid calculation part for finding the centroid of a figure obtained by making a boundary of each crystal parallel to the surface of the thin film on the basis of information indicating positions of each vertex and the boundary of an adjacent crystal of a plurality of crystals on the surface of the thin film including the plurality of the crystals and being projected on a reference plane being a plane including the bottom face of the crystal; and a crystal inclination angle calculation part for calculating a crystal inclination angle being an angle making a vertical line being a vertical straight line on the reference plane by allowing a centroid-vertex straight line connecting the centroid and the vertex to include the centroid. COPYRIGHT: (C)2007,JPO&INPIT</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS SEMICONDUCTOR DEVICES TESTING |
| title | THIN FILM CHARACTERISTIC EVALUATION METHOD, THIN FILM CHARACTERISTIC EVALUATION DEVICE, AND THIN FILM SOLAR CELL |
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